An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.

Reduced-order modelling of the bending of an array of torsional micromirrors

NANNINI, ANDREA;PIERI, FRANCESCO
2007-01-01

Abstract

An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.
2007
Molfese, A; Nannini, Andrea; Pieri, Francesco
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/114995
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