Testing and characterization of Micro-Electro-Mechanical Systems (MEMS) and Micro-Opto-Electro-Mechanical Systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine motions, deflections and resonance frequencies that are the distinguishing characteristics of these systems. This paper presents an environment for MEMS and MOEMS testing and characterization. The environment is based on ISIF (Intelligent Sensor InterFace) platform developed by SensorDynamics AG in collaboration with the University of Pisa. The environment has been used to perform several measurements on a scanning micromirror developed by the Fraunhofer Institute for Silicon Technology (ISIT). The testing environment has been validated comparing measurement results with results obtained by FEM simulation performed with Comsol Multiphysics™ Finally, these results have been used to create an electrical equivalent model of the micromirror.
Characterization and testing of a double axis scanning micromirror
FANUCCI, LUCA;
2010-01-01
Abstract
Testing and characterization of Micro-Electro-Mechanical Systems (MEMS) and Micro-Opto-Electro-Mechanical Systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine motions, deflections and resonance frequencies that are the distinguishing characteristics of these systems. This paper presents an environment for MEMS and MOEMS testing and characterization. The environment is based on ISIF (Intelligent Sensor InterFace) platform developed by SensorDynamics AG in collaboration with the University of Pisa. The environment has been used to perform several measurements on a scanning micromirror developed by the Fraunhofer Institute for Silicon Technology (ISIT). The testing environment has been validated comparing measurement results with results obtained by FEM simulation performed with Comsol Multiphysics™ Finally, these results have been used to create an electrical equivalent model of the micromirror.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
