The effectiveness of a new method for the offset compensation of integrated thermal flow sensors is demonstrated. The method is based on flow sensors with a double heater configuration, designed with a commercial CMOS process and fabricated by means of a post-processing technique. The power unbalance between the two heaters is used to compensate the unavoidable sensor offset. Measurements in nitrogen at room temperature confirm an offset decrease by nearly one order of magnitude.
An offset compensation method for integrated thermal flow sensors
BRUSCHI, PAOLO;PIOTTO, MASSIMO
2010-01-01
Abstract
The effectiveness of a new method for the offset compensation of integrated thermal flow sensors is demonstrated. The method is based on flow sensors with a double heater configuration, designed with a commercial CMOS process and fabricated by means of a post-processing technique. The power unbalance between the two heaters is used to compensate the unavoidable sensor offset. Measurements in nitrogen at room temperature confirm an offset decrease by nearly one order of magnitude.File in questo prodotto:
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