The paper presents the results of an extensive set of measurements performed on silicon microstrip sensors produced by STMicroelectronics for the CMS Tracker, 5" and 6" technologies were used to process several series of detector prototypes. Detectors 300 m thick were produced on 5" wafers and fully characterized. A new design on 500 m thick wafers with 6" technology has been recently implemented. The performance of three different layouts has been investigated in terms of macroscopic electrical parameters and radiation resistance. (C) 2002 Elsevier Science B.V. All rights reserved.
Results with microstrip detectors produced by STMicroelectronics for the CMS tracker
MESSINEO, ALBERTO MARIA;TONELLI, GUIDO EMILIO;
2002-01-01
Abstract
The paper presents the results of an extensive set of measurements performed on silicon microstrip sensors produced by STMicroelectronics for the CMS Tracker, 5" and 6" technologies were used to process several series of detector prototypes. Detectors 300 m thick were produced on 5" wafers and fully characterized. A new design on 500 m thick wafers with 6" technology has been recently implemented. The performance of three different layouts has been investigated in terms of macroscopic electrical parameters and radiation resistance. (C) 2002 Elsevier Science B.V. All rights reserved.File in questo prodotto:
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