A gas flow regulator for ion propulsion system on board small satellites is proposed. The device is fabricated by means of micromachining techniques and is made up of a silicon die and a bomsilicate glass cover joined together by means of anodic bonding. The fabrication process of two different versions or the deviee is described. The gas mass flow dependenrr on both the inlet pmnm and the absolute temperature is measumd and diseussed.
Micromachined Gas Flow Regulator for Ion Propulsion Systems
BRUSCHI, PAOLO;DILIGENTI, ALESSANDRO;PIOTTO, MASSIMO
2002-01-01
Abstract
A gas flow regulator for ion propulsion system on board small satellites is proposed. The device is fabricated by means of micromachining techniques and is made up of a silicon die and a bomsilicate glass cover joined together by means of anodic bonding. The fabrication process of two different versions or the deviee is described. The gas mass flow dependenrr on both the inlet pmnm and the absolute temperature is measumd and diseussed.File in questo prodotto:
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