A novel p–v probe for the measurement of the acoustic impedance is proposed. The device is fabricated assembling a micromachined acoustic particle velocity sensor, a commercial microphone, and an electronic read-out interface. The velocity sensor consists of two integrated polysilicon heaters placed over suspended dielectric membranes. The sensor has been designed with a commercial CMOS process and fabricated using a simple post-processing technique. The electronic interface is based on a Wheatstone bridge and a low noise instrumentation amplifier. Preliminary tests confirm the functionality of the proposed probe.
Design and Fabrication of a Compact p-v Probe for Acoustic Impedance Measurement
PIOTTO, MASSIMO;LONGHITANO, AURELIO NUNZIO;BRUSCHI, PAOLO;
2014-01-01
Abstract
A novel p–v probe for the measurement of the acoustic impedance is proposed. The device is fabricated assembling a micromachined acoustic particle velocity sensor, a commercial microphone, and an electronic read-out interface. The velocity sensor consists of two integrated polysilicon heaters placed over suspended dielectric membranes. The sensor has been designed with a commercial CMOS process and fabricated using a simple post-processing technique. The electronic interface is based on a Wheatstone bridge and a low noise instrumentation amplifier. Preliminary tests confirm the functionality of the proposed probe.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
