A flow meter for liquids, based on a single chip equipped with a temperature control, thermally connected to the fluid by means of a proper feed-through is presented. A D-MOS power heater with a linear power-to-voltage relationship has been included to implement constant temperature anemometry. Low noise characteristics allow detection of liquid velocities of the order of 1 cm/s. Preliminary results in deionized water are presented.
Integrated flow meter for liquids based on a single chip probe with low noise temperature control
BRUSCHI, PAOLO;PIOTTO, MASSIMO
2005-01-01
Abstract
A flow meter for liquids, based on a single chip equipped with a temperature control, thermally connected to the fluid by means of a proper feed-through is presented. A D-MOS power heater with a linear power-to-voltage relationship has been included to implement constant temperature anemometry. Low noise characteristics allow detection of liquid velocities of the order of 1 cm/s. Preliminary results in deionized water are presented.File in questo prodotto:
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