High-sensitivity (bio)sensing with electrochemically-etched silicon structures and systems a the micro- and nano-scale

A number of technologies have been proposed over the years to prepare nano and micro structures and systems for the detection of molecular targets in liquids.Among these technologies, electrochemical etching of silicon has increasingly attracted attention for high-sensitivity (bio)sensing, due to its peculiarity of enabling the fabrication of both nano and micro structures and systems through an effective tuning of the etching features over 4 orders of magnitude, from a few nanometers to tens of micrometers.In this paper, a few recent works on the use of silicon nano-micro structures and systems prepared by electrochemical etching for the high-sensitivity detection of small ions and large biomolecules are presented and discussed.