A simple and feasible package to improve the sensitivity of an integrated thermal flow sensor is presented. The sensor is a calorimeter with two polysilicon heaters between an upstream and a downstream thermopile, all positioned over suspended dielectric membranes. The chip was designed with a commercial CMOS process and post-processed to obtain the thermal insulation from the substrate. Preliminary measurements for flow rates in the range 0-50 sccm are presented.
Response improvement of integrated gas flow sensors by means of packaging
BRUSCHI, PAOLO;PENNELLI, GIOVANNI;PIOTTO, MASSIMO
2006-01-01
Abstract
A simple and feasible package to improve the sensitivity of an integrated thermal flow sensor is presented. The sensor is a calorimeter with two polysilicon heaters between an upstream and a downstream thermopile, all positioned over suspended dielectric membranes. The chip was designed with a commercial CMOS process and post-processed to obtain the thermal insulation from the substrate. Preliminary measurements for flow rates in the range 0-50 sccm are presented.File in questo prodotto:
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