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EnglishA piezoresistive readout method for MEMS torsional resonators is presented. To this purpose, a new theoretical model describing the piezoresistive effects on monocrystalline and polycrystalline beams, used as suspended resistors, is investigated. A square law, linking the angular displacement thetas to the resistance variation DeltaR, is derived. The theory is confirmed by ANSYS FE (finite element) simulations. When adding a feedback to an actuator, a piezoresistive sensing part can read the output signal without increasing the process complexity and represents an alternative to capacitive sensing. A measurement configuration, based on a Wheatstone bridge, as well as an implementation of this measurement scheme to silicon-germanium (SiGe) resonators are also proposed.
| Titolo: | A model for piezoresistance in torsional MEMS springs |
| Autori interni: | |
| Anno del prodotto: | 2007 |
| Abstract: | A piezoresistive readout method for MEMS torsional resonators is presented. To this purpose, a new theoretical model describing the piezoresistive effects on monocrystalline and polycrystalline beams, used as suspended resistors, is investigated. A square law, linking the angular displacement thetas to the resistance variation DeltaR, is derived. The theory is confirmed by ANSYS FE (finite element) simulations. When adding a feedback to an actuator, a piezoresistive sensing part can read the output signal without increasing the process complexity and represents an alternative to capacitive sensing. A measurement configuration, based on a Wheatstone bridge, as well as an implementation of this measurement scheme to silicon-germanium (SiGe) resonators are also proposed. |
| Handle: | http://hdl.handle.net/11568/110520 |
| ISBN: | 9781424419838 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
File in questo prodotto:
http://hdl.handle.net/11568/110520
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