Thermal gas flow meters based on two different architectures have been fabricated using two commercial CMOS processes. Low cost postprocessing methods, adapted to the features of modern industrial processes, are discussed. Three inexpensive packaging strategies are proposed and their effects on the device response have been compared. The sensitivity dependence on gas type has been investigated for the two proposed architectures.
Postprocessing technologies, interface circuits and packaging strategies for CMOS compatible gas flow sensors
BRUSCHI, PAOLO;PIOTTO, MASSIMO;
2007-01-01
Abstract
Thermal gas flow meters based on two different architectures have been fabricated using two commercial CMOS processes. Low cost postprocessing methods, adapted to the features of modern industrial processes, are discussed. Three inexpensive packaging strategies are proposed and their effects on the device response have been compared. The sensitivity dependence on gas type has been investigated for the two proposed architectures.File in questo prodotto:
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