EnglishIn this work, we demonstrate the full compatibility of porous silicon (PS) gas sensor integration with an industrial microelectronic process. Several PS-based gas sensors were integrated on the same chip together with some standard electronic circuits by using the BCD6 process of STMicroelectronics. Here, we show that technological steps required for PS formation does not affect the critical parameters of on-chip electronic circuits.
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http://hdl.handle.net/11568/119351| Titolo: | Validation of porous silicon gas sensor integration with a standard microlectronic process |
| Autori interni: | BARILLARO, GIUSEPPE BRUSCHI, PAOLO STRAMBINI, LUCANOS MARSILIO |
| Anno del prodotto: | 2008 |
| Abstract: | In this work, we demonstrate the full compatibility of porous silicon (PS) gas sensor integration with an industrial microelectronic process. Several PS-based gas sensors were integrated on the same chip together with some standard electronic circuits by using the BCD6 process of STMicroelectronics. Here, we show that technological steps required for PS formation does not affect the critical parameters of on-chip electronic circuits. |
| Handle: | http://hdl.handle.net/11568/119351 |
| ISBN: | 9783000252174 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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