In this work, we demonstrate the full compatibility of porous silicon (PS) gas sensor integration with an industrial microelectronic process. Several PS-based gas sensors were integrated on the same chip together with some standard electronic circuits by using the BCD6 process of STMicroelectronics. Here, we show that technological steps required for PS formation does not affect the critical parameters of on-chip electronic circuits.
Validation of porous silicon gas sensor integration with a standard microlectronic process
BARILLARO, GIUSEPPE;BRUSCHI, PAOLO;STRAMBINI, LUCANOS MARSILIO
2008-01-01
Abstract
In this work, we demonstrate the full compatibility of porous silicon (PS) gas sensor integration with an industrial microelectronic process. Several PS-based gas sensors were integrated on the same chip together with some standard electronic circuits by using the BCD6 process of STMicroelectronics. Here, we show that technological steps required for PS formation does not affect the critical parameters of on-chip electronic circuits.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
