A very compact integrated flow meter for liquids is presented. An original and low cost package method, compatible with standard electronic chip packages, is proposed. The experimental characterization demonstrates that the sensor is suitable for detecting liquid flow rates of the order of a few ml/h, with dynamic range of 1:100, making it a good candidate for biomedical application such as maximal dose controllers in drug delivery systems.
A Cmos Compatible Liquid Flow Meter
BRUSCHI, PAOLO;Dei M;PIOTTO, MASSIMO
2008-01-01
Abstract
A very compact integrated flow meter for liquids is presented. An original and low cost package method, compatible with standard electronic chip packages, is proposed. The experimental characterization demonstrates that the sensor is suitable for detecting liquid flow rates of the order of a few ml/h, with dynamic range of 1:100, making it a good candidate for biomedical application such as maximal dose controllers in drug delivery systems.File in questo prodotto:
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