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EnglishThe frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range.
| Titolo: | Frequency Response of Thermal Gas Velocity Detectors |
| Autori interni: | |
| Anno del prodotto: | 2008 |
| Abstract: | The frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range. |
| Handle: | http://hdl.handle.net/11568/123114 |
| ISBN: | 9789812835970 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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