The frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range.

Frequency Response of Thermal Gas Velocity Detectors

BRUSCHI, PAOLO;PIOTTO, MASSIMO
2008

Abstract

The frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range.
9789812835970
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/123114
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