The frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range.
Frequency Response of Thermal Gas Velocity Detectors
BRUSCHI, PAOLO;Dei M;PIOTTO, MASSIMO
2008-01-01
Abstract
The frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
