CINECA IRIS Institutional Research Information System
IRIS è la soluzione IT che facilita la raccolta e la gestione dei dati relativi alle attività e ai prodotti della ricerca. Fornisce a ricercatori, amministratori e valutatori gli strumenti per monitorare i risultati della ricerca, aumentarne la visibilità e allocare in modo efficace le risorse disponibili.
EnglishThe frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range.
| Titolo: | Frequency Response of Thermal Gas Velocity Detectors |
| Autori interni: | |
| Anno del prodotto: | 2008 |
| Abstract: | The frequency response of thermal gas flowmeters fabricated by means of two different commercial CMOS processes has been investigated. The device are based on a standard differential temperature configuration with a heater placed between two temperature probes. Thermal insulation from the silicon substrate has been obtained by applying a simple postprocessing technique. A dependence of the frequency response on dielectric thickness has been found in the investigated frequency range. |
| Handle: | http://hdl.handle.net/11568/123114 |
| ISBN: | 9789812835970 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
File in questo prodotto:
Copyright © 2020