An integrated sensor capable of detecting multiple gas flows is presented. The sensor incorporates several recently introduced innovations, allowing virtually drift free offset compensation and reduction of the dependence on pressure. Furthermore, an inexpensive packaging method is used to convey distinct gas flows to separate areas of the relatively small chip. Results of tests performed in nitrogen flow are presented
A single chip, offset compensated multi-channel flow sensor with integrated readout interface
PIOTTO, MASSIMO;DEI M;BUTTI, FEDERICO;BRUSCHI, PAOLO
2010-01-01
Abstract
An integrated sensor capable of detecting multiple gas flows is presented. The sensor incorporates several recently introduced innovations, allowing virtually drift free offset compensation and reduction of the dependence on pressure. Furthermore, an inexpensive packaging method is used to convey distinct gas flows to separate areas of the relatively small chip. Results of tests performed in nitrogen flow are presentedFile in questo prodotto:
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