In this work, a significant step towards the fabrication of very high aspect-ratio complex microsystems by silicon electrochemical micromachining in HF-based electrolytes (ECM) is given. High aspect-ratio MEMS structures, with different shape and dimensions, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology.
Advances in electrochemical micromachining of silicon: Towards MEMS fabrication
STRAMBINI, LUCANOS MARSILIO;BARILLARO, GIUSEPPE
2011-01-01
Abstract
In this work, a significant step towards the fabrication of very high aspect-ratio complex microsystems by silicon electrochemical micromachining in HF-based electrolytes (ECM) is given. High aspect-ratio MEMS structures, with different shape and dimensions, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology.File in questo prodotto:
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