In this work, a compact analytical model to evaluate the effect of perforations on the resonance frequencies of MEMS beams is presented. The model is based on a modification of the standard Euler-Bernoulli beam theory. Analytical expressions for an equivalent bending stiffness of the beam are developed and used to compute the expected resonance frequencies. The results are in good agreement with FEM simulations for most practical designs.
A symple analytical model for the resonance frequency of perforated beams
LUSCHI, LUCA;PIERI, FRANCESCO
2013-01-01
Abstract
In this work, a compact analytical model to evaluate the effect of perforations on the resonance frequencies of MEMS beams is presented. The model is based on a modification of the standard Euler-Bernoulli beam theory. Analytical expressions for an equivalent bending stiffness of the beam are developed and used to compute the expected resonance frequencies. The results are in good agreement with FEM simulations for most practical designs.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
