Suspended hotplates equipped with a polysilcon heater and poly-p/poly-n thermopile has been fabricated using a commercial 0.8 μm CMOS process and a final post-processing consisting in a front-side micromaching technological step. The devices has been statically and dynamically characterized showing the achieved high sensitivity and fast response.
A Thermally Insulated Micromachined Thermopile Obtained From a Commercial CMOS Process
BRUSCHI, PAOLO;PIOTTO, MASSIMO
2000-01-01
Abstract
Suspended hotplates equipped with a polysilcon heater and poly-p/poly-n thermopile has been fabricated using a commercial 0.8 μm CMOS process and a final post-processing consisting in a front-side micromaching technological step. The devices has been statically and dynamically characterized showing the achieved high sensitivity and fast response.File in questo prodotto:
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