An electronic circuit using a non-linear measurement method to characterize two-axis micromachined accelerometers is presented. Two different measurement strategies are possible: single-ended (which also allows cross-sensitivity measurements) and differential. Preliminary curves of the response around the resonance frequency at different vacuum levels are presented.
Titolo: | A measurement interface for single-ended and differential sensing of micromachined accelerometers at different vacuum levels |
Autori interni: | |
Anno del prodotto: | 2004 |
Abstract: | An electronic circuit using a non-linear measurement method to characterize two-axis micromachined accelerometers is presented. Two different measurement strategies are possible: single-ended (which also allows cross-sensitivity measurements) and differential. Preliminary curves of the response around the resonance frequency at different vacuum levels are presented. |
Handle: | http://hdl.handle.net/11568/192383 |
Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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