An electronic circuit using a non-linear measurement method to characterize two-axis micromachined accelerometers is presented. Two different measurement strategies are possible: single-ended (which also allows cross-sensitivity measurements) and differential. Preliminary curves of the response around the resonance frequency at different vacuum levels are presented.
A measurement interface for single-ended and differential sensing of micromachined accelerometers at different vacuum levels
BRUSCHI, PAOLO;NANNINI, ANDREA;PIERI, FRANCESCO
2004-01-01
Abstract
An electronic circuit using a non-linear measurement method to characterize two-axis micromachined accelerometers is presented. Two different measurement strategies are possible: single-ended (which also allows cross-sensitivity measurements) and differential. Preliminary curves of the response around the resonance frequency at different vacuum levels are presented.File in questo prodotto:
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