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EnglishIn this work, the mass response of a resonant, CMOS (Complementary MOS) compatible MEMS sensor, oriented at the detection of diagnostic markers, is presented. The sensor is fabricated with a MEMS (Micro-electro-mechanical System) post-processing method on a standard, CMOS-based VLSI technology, retaining maximum compatibility with the CMOS process flow. The mechanical resonator is based on inductive actuation and detection, and the sensing is based on the microbalance principle. A protocol for covalent bonding of organo-functional silanes (to be used as link sites for biomolecular probes) on the resonator surface is presented. The effect on the mechanical frequency response of a test mass attached to the surface is demonstrated by grafting of gold nanoparticles (NPs) to the amino- terminated surface silanes. The measured mass sensitivity compares favorably both with standard Quartz Crystal Microbalances (QCM) and with existing MEMS-based approaches.
| Titolo: | Mass Response of A CMOS-Compatible, Magnetically Actuated MEMS Microbalance |
| Autori interni: | |
| Anno del prodotto: | 2012 |
| Rivista: | |
| Abstract: | In this work, the mass response of a resonant, CMOS (Complementary MOS) compatible MEMS sensor, oriented at the detection of diagnostic markers, is presented. The sensor is fabricated with a MEMS (Micro-electro-mechanical System) post-processing method on a standard, CMOS-based VLSI technology, retaining maximum compatibility with the CMOS process flow. The mechanical resonator is based on inductive actuation and detection, and the sensing is based on the microbalance principle. A protocol for covalent bonding of organo-functional silanes (to be used as link sites for biomolecular probes) on the resonator surface is presented. The effect on the mechanical frequency response of a test mass attached to the surface is demonstrated by grafting of gold nanoparticles (NPs) to the amino- terminated surface silanes. The measured mass sensitivity compares favorably both with standard Quartz Crystal Microbalances (QCM) and with existing MEMS-based approaches. |
| Handle: | http://hdl.handle.net/11568/193984 |
| ISBN: | 9781461409342 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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