The strong dependence of the quality factor of MEMS resonators on the pressure suggests their possible application as vacuum sensors. Due to electrical parasitics, their spectra cannot be measured with electrical methods unless the useful signal is isolated, either in the frequency [1, 2] or in the time domain [1, 3]. By exploiting the quadratic relationship between the input voltage and the resulting force, we measured the frequency response and quality factor of several lateral MEMS resonators at different vacuum levels.
An Electrical 2nd Harmonic Method for the Measurement of the Quality Factor of Microelectromechanical Lateral Resonators
BRUSCHI, PAOLO;NANNINI, ANDREA;PIERI, FRANCESCO
2002-01-01
Abstract
The strong dependence of the quality factor of MEMS resonators on the pressure suggests their possible application as vacuum sensors. Due to electrical parasitics, their spectra cannot be measured with electrical methods unless the useful signal is isolated, either in the frequency [1, 2] or in the time domain [1, 3]. By exploiting the quadratic relationship between the input voltage and the resulting force, we measured the frequency response and quality factor of several lateral MEMS resonators at different vacuum levels.File in questo prodotto:
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