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EnglishA smart flow sensor fabricated on a single chip with a commercial CMOS process followed by a post-processing technique is characterized. The sensing structures are micro-calorimeters made up of two heaters placed between an upstream and a downstream temperature probe. The integrated read-out electronics performs the automatic compensation of intrinsic offset and pressure effects. The effectiveness of the proposed correction methods is verified in nitrogen at room temperature.
| Titolo: | Experimental characterization of a novel single chip flow sensor with automatic compensation of pressure effects |
| Autori interni: | |
| Anno del prodotto: | 2013 |
| Abstract: | A smart flow sensor fabricated on a single chip with a commercial CMOS process followed by a post-processing technique is characterized. The sensing structures are micro-calorimeters made up of two heaters placed between an upstream and a downstream temperature probe. The integrated read-out electronics performs the automatic compensation of intrinsic offset and pressure effects. The effectiveness of the proposed correction methods is verified in nitrogen at room temperature. |
| Handle: | http://hdl.handle.net/11568/278742 |
| ISBN: | 9781467359832 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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