A system for gas flow measurement, based on MEMS flow sensing microstructures and a sigma-delta interface, is described. The sensing structures consist of double-heater differential microcalorimeters, obtained by means of a post-processing procedure applied to chips fabricated using the Bipolar-CMOS-DMOS process BCD6s of STMicroelectronics. Part of the sigma-delta modulator is implemented in the thermal domain by exploiting the versatility of the double-heater sensing structures. The measurements performed in nitrogen flow prove the effectiveness of the proposed approach.
MEMS Flow Sensor Based on a Sigma-Delta Modulator Embedded in the Thermal DomainSensors and Microsystems
PIOTTO, MASSIMO;LONGHITANO, AURELIO NUNZIO;DEL CESTA, FRANCESCO;BRUSCHI, PAOLO
2014-01-01
Abstract
A system for gas flow measurement, based on MEMS flow sensing microstructures and a sigma-delta interface, is described. The sensing structures consist of double-heater differential microcalorimeters, obtained by means of a post-processing procedure applied to chips fabricated using the Bipolar-CMOS-DMOS process BCD6s of STMicroelectronics. Part of the sigma-delta modulator is implemented in the thermal domain by exploiting the versatility of the double-heater sensing structures. The measurements performed in nitrogen flow prove the effectiveness of the proposed approach.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
