A system for gas flow measurement, based on MEMS flow sensing microstructures and a sigma-delta interface, is described. The sensing structures consist of double-heater differential microcalorimeters, obtained by means of a post-processing procedure applied to chips fabricated using the Bipolar-CMOS-DMOS process BCD6s of STMicroelectronics. Part of the sigma-delta modulator is implemented in the thermal domain by exploiting the versatility of the double-heater sensing structures. The measurements performed in nitrogen flow prove the effectiveness of the proposed approach.

MEMS Flow Sensor Based on a Sigma-Delta Modulator Embedded in the Thermal DomainSensors and Microsystems

PIOTTO, MASSIMO;LONGHITANO, AURELIO NUNZIO;DEL CESTA, FRANCESCO;BRUSCHI, PAOLO
2014-01-01

Abstract

A system for gas flow measurement, based on MEMS flow sensing microstructures and a sigma-delta interface, is described. The sensing structures consist of double-heater differential microcalorimeters, obtained by means of a post-processing procedure applied to chips fabricated using the Bipolar-CMOS-DMOS process BCD6s of STMicroelectronics. Part of the sigma-delta modulator is implemented in the thermal domain by exploiting the versatility of the double-heater sensing structures. The measurements performed in nitrogen flow prove the effectiveness of the proposed approach.
2014
9783319006833
9783319006840
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/536669
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