A novel p–v probe for the measurement of the acoustic impedance is proposed. The device is fabricated assembling a micromachined acoustic particle velocity sensor, a commercial microphone, and an electronic read-out interface. The velocity sensor consists of two integrated polysilicon heaters placed over suspended dielectric membranes. The sensor has been designed with a commercial CMOS process and fabricated using a simple post-processing technique. The electronic interface is based on a Wheatstone bridge and a low noise instrumentation amplifier. Preliminary tests confirm the functionality of the proposed probe.
Titolo: | Design and Fabrication of a Compact p-v Probe for Acoustic Impedance Measurement |
Autori interni: | |
Anno del prodotto: | 2014 |
Serie: | |
Handle: | http://hdl.handle.net/11568/536673 |
ISBN: | 9783319006833 9783319006840 |
Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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