A novel p–v probe for the measurement of the acoustic impedance is proposed. The device is fabricated assembling a micromachined acoustic particle velocity sensor, a commercial microphone, and an electronic read-out interface. The velocity sensor consists of two integrated polysilicon heaters placed over suspended dielectric membranes. The sensor has been designed with a commercial CMOS process and fabricated using a simple post-processing technique. The electronic interface is based on a Wheatstone bridge and a low noise instrumentation amplifier. Preliminary tests confirm the functionality of the proposed probe.

Design and Fabrication of a Compact p-v Probe for Acoustic Impedance Measurement

PIOTTO, MASSIMO;LONGHITANO, AURELIO NUNZIO;BRUSCHI, PAOLO;
2014

Abstract

A novel p–v probe for the measurement of the acoustic impedance is proposed. The device is fabricated assembling a micromachined acoustic particle velocity sensor, a commercial microphone, and an electronic read-out interface. The velocity sensor consists of two integrated polysilicon heaters placed over suspended dielectric membranes. The sensor has been designed with a commercial CMOS process and fabricated using a simple post-processing technique. The electronic interface is based on a Wheatstone bridge and a low noise instrumentation amplifier. Preliminary tests confirm the functionality of the proposed probe.
9783319006833
9783319006840
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/536673
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