In this work, we present a method for the design of piezoelectrically actuated flexural phono-nic crystal beam devices, targeted at the development of innovative biochemical sensors in a MEMS technology. The method exploits the Timoshenko transmission matrices. The calcu-lated transmission spectra are shown to be in excellent agreement with FEM simulations.
Design of Piezo-Actuated MEMS Flexural Phononic Crystals for Mass Sensing Applications
LUSCHI, LUCA;PIERI, FRANCESCO
2015-01-01
Abstract
In this work, we present a method for the design of piezoelectrically actuated flexural phono-nic crystal beam devices, targeted at the development of innovative biochemical sensors in a MEMS technology. The method exploits the Timoshenko transmission matrices. The calcu-lated transmission spectra are shown to be in excellent agreement with FEM simulations.File in questo prodotto:
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