Novel acoustic particle velocity (APV) sensors suitable for low voltage, battery-powered systems are proposed. The sensing structure consists of four silicide polysilicon wires placed over suspended dielectric membranes and arranged in a Wheatstone full-bridge configuration. The device has been fabricated combining a commercial CMOS process with a simple and low cost post-processing technique. An ultra low noise chopper pre-amplifier has been integrated on the same chip. Preliminary noise and acoustic characterization is presented.
|Titolo:||Low voltage acoustic particle velocity sensor with integrated low noise chopper pre-amplifier|
|Anno del prodotto:||2014|
|Appare nelle tipologie:||4.1 Contributo in Atti di convegno|