Novel acoustic particle velocity (APV) sensors suitable for low voltage, battery-powered systems are proposed. The sensing structure consists of four silicide polysilicon wires placed over suspended dielectric membranes and arranged in a Wheatstone full-bridge configuration. The device has been fabricated combining a commercial CMOS process with a simple and low cost post-processing technique. An ultra low noise chopper pre-amplifier has been integrated on the same chip. Preliminary noise and acoustic characterization is presented.

Low voltage acoustic particle velocity sensor with integrated low noise chopper pre-amplifier

PIOTTO, MASSIMO;BUTTI, FEDERICO;DI PANCRAZIO, ALESSIA;BRUSCHI, PAOLO
2014

Abstract

Novel acoustic particle velocity (APV) sensors suitable for low voltage, battery-powered systems are proposed. The sensing structure consists of four silicide polysilicon wires placed over suspended dielectric membranes and arranged in a Wheatstone full-bridge configuration. The device has been fabricated combining a commercial CMOS process with a simple and low cost post-processing technique. An ultra low noise chopper pre-amplifier has been integrated on the same chip. Preliminary noise and acoustic characterization is presented.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/811016
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