Novel acoustic particle velocity (APV) sensors suitable for low voltage, battery-powered systems are proposed. The sensing structure consists of four silicide polysilicon wires placed over suspended dielectric membranes and arranged in a Wheatstone full-bridge configuration. The device has been fabricated combining a commercial CMOS process with a simple and low cost post-processing technique. An ultra low noise chopper pre-amplifier has been integrated on the same chip. Preliminary noise and acoustic characterization is presented.
Titolo: | Low voltage acoustic particle velocity sensor with integrated low noise chopper pre-amplifier |
Autori interni: | |
Anno del prodotto: | 2014 |
Rivista: | |
Handle: | http://hdl.handle.net/11568/811016 |
Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
File in questo prodotto:
File | Descrizione | Tipologia | Licenza | |
---|---|---|---|---|
Euros_2014_Acoustical.pdf | Versione finale editoriale | ![]() | Open AccessVisualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.