A new integrated sensor for the acoustic particle velocity measurement is proposed. The device is based on a thermal principle and is made up of two polysilicon heaters placed over suspended dielectric membranes. The sensor is fabricated by means of a post-processing technique applied to chips designed with a commercial CMOS process. Preliminary measurements confirm the device suitability for acoustic applications. © 2012 Springer Science+Business Media, LLC.
Acoustic particle velocity sensors based on a thermal principle
PIOTTO, MASSIMO;BRUSCHI, PAOLO;BUTTI, FEDERICO
2012-01-01
Abstract
A new integrated sensor for the acoustic particle velocity measurement is proposed. The device is based on a thermal principle and is made up of two polysilicon heaters placed over suspended dielectric membranes. The sensor is fabricated by means of a post-processing technique applied to chips designed with a commercial CMOS process. Preliminary measurements confirm the device suitability for acoustic applications. © 2012 Springer Science+Business Media, LLC.File in questo prodotto:
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