The increase of microfluidic applications has led to a growing request for accurate miniaturized flow sensors, suitable for operating in gas velocity as low as few cm/s. In this work a classic micromachined anemometer, consisting of a suspended membrane equipped with a polysilicon heater and a p-poly/n-poly thermopile as the temperature sensor, has been analytically and experimentally characterized in very low nitrogen flow rates. The sensor operating limits in terms of sensitivity and dynamical range have been investigated and some solutions to improve the sensor performances are proposed.
Very low flow rate behaviour of micromachined hot-plate anemometers
BRUSCHI, PAOLO;PIOTTO, MASSIMO
2003-01-01
Abstract
The increase of microfluidic applications has led to a growing request for accurate miniaturized flow sensors, suitable for operating in gas velocity as low as few cm/s. In this work a classic micromachined anemometer, consisting of a suspended membrane equipped with a polysilicon heater and a p-poly/n-poly thermopile as the temperature sensor, has been analytically and experimentally characterized in very low nitrogen flow rates. The sensor operating limits in terms of sensitivity and dynamical range have been investigated and some solutions to improve the sensor performances are proposed.File in questo prodotto:
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