In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam with periodic perforations, is presented. We introduce a transmission matrix approach based on the Timoshenko beam theory suited for the fast design of such devices. The calculated transmission spectra are in excellent agreement with FEM simulations. A preliminary estimate of the device sensitivity, assuming the prostate specific antigen (PSA) as the target analyte, is reported.
Design of MEMS mass sensors based of flexural phononic crystals
LUSCHI, LUCA;PIERI, FRANCESCO
2015-01-01
Abstract
In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam with periodic perforations, is presented. We introduce a transmission matrix approach based on the Timoshenko beam theory suited for the fast design of such devices. The calculated transmission spectra are in excellent agreement with FEM simulations. A preliminary estimate of the device sensitivity, assuming the prostate specific antigen (PSA) as the target analyte, is reported.File in questo prodotto:
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