Here we show an all-silicon in-plane optical accelerometer for low-frequency applications (below 150 Hz) with high-sensitivity (about 10 μm/G) and good resolution (about 100 μG). The entire system has been designed and then fabricated via silicon electrochemical micromachining (ECM) technology.
ALL-SILICON IN-PLANE OPTICAL ACCELEROMETER BY SILICON ELECTROCHEMICAL MICROMACHINING
ROBBIANO, VALENTINA;POLITO, GIOVANNI;Surdo, S.;BARILLARO, GIUSEPPE
2016-01-01
Abstract
Here we show an all-silicon in-plane optical accelerometer for low-frequency applications (below 150 Hz) with high-sensitivity (about 10 μm/G) and good resolution (about 100 μG). The entire system has been designed and then fabricated via silicon electrochemical micromachining (ECM) technology.File in questo prodotto:
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