In this work, we propose a single-chip sensor for the detection of two extremely low, independent differential pressures. The operating principle consists in measuring the airflow induced by the pressure through a channel of sub-millimeter cross-section [1]. The airflow is measured by differential thermal flow sensors, implementing a recently proposed drift-free offset compensation approach. Use of a low-noise, low-power readout interface, integrated on the same chip as the sensing structures, allowed the achievement of resolutions of 1.29 mPa, which are one order of magnitude lower than state-of-art devices. This performance has been obtained with power consumptions suitable for battery-powered applications.

A Compact, Dual Channel Flow-based Differential Pressure Sensor with mPa Resolution and Sub-10 mW Power Consumption

PIOTTO, MASSIMO;DEL CESTA, SIMONE;BRUSCHI, PAOLO
2016

Abstract

In this work, we propose a single-chip sensor for the detection of two extremely low, independent differential pressures. The operating principle consists in measuring the airflow induced by the pressure through a channel of sub-millimeter cross-section [1]. The airflow is measured by differential thermal flow sensors, implementing a recently proposed drift-free offset compensation approach. Use of a low-noise, low-power readout interface, integrated on the same chip as the sensing structures, allowed the achievement of resolutions of 1.29 mPa, which are one order of magnitude lower than state-of-art devices. This performance has been obtained with power consumptions suitable for battery-powered applications.
File in questo prodotto:
File Dimensione Formato  
BruschiP_844993.pdf

accesso aperto

Tipologia: Versione finale editoriale
Licenza: Creative commons
Dimensione 1.03 MB
Formato Adobe PDF
1.03 MB Adobe PDF Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/844993
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? 2
social impact