A fundamental loss mechanism in microresonators at low vacuum levels is the energy transfer from the resonating mass to the surrounding gas. Both continuum models (based on Navier-Stokes equations) and molecular models (based on the microscopic motion of the gas molecules) have been proposed to explain experimental damping data. In this work, we present measurements of quality factor and damping factor, extracted with a novel measurement method, for several micromachined resonators, and we compare them with ...
GAS DAMPING AT LOW PRESSURES IN MICROMACHINED RESONATORS
NANNINI, ANDREA;PIERI, FRANCESCO;
2004-01-01
Abstract
A fundamental loss mechanism in microresonators at low vacuum levels is the energy transfer from the resonating mass to the surrounding gas. Both continuum models (based on Navier-Stokes equations) and molecular models (based on the microscopic motion of the gas molecules) have been proposed to explain experimental damping data. In this work, we present measurements of quality factor and damping factor, extracted with a novel measurement method, for several micromachined resonators, and we compare them with ...File in questo prodotto:
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