A novel thermal flow sensor based on two thermopiles, placed downstream and upstream to an heater split into two sections, is presented. The output signal is the voltage unbalance on the two heater sections that maintains equal upstream and downstream temperatures. Experimental results in nitrogen flow are presented.

A split heater integrated gas flow sensor for ultra low flow regimes

BRUSCHI, PAOLO;DILIGENTI, ALESSANDRO;PIOTTO, MASSIMO
2004

Abstract

A novel thermal flow sensor based on two thermopiles, placed downstream and upstream to an heater split into two sections, is presented. The output signal is the voltage unbalance on the two heater sections that maintains equal upstream and downstream temperatures. Experimental results in nitrogen flow are presented.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/85730
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