A thermal flow sensor integrated with a programmable electronic interface into the same chip is proposed. The sensing structure is a micro-calorimeter with a double heater configuration fabricated with a simple post-processing technique applied to chip designed with a commercial CMOS process. The electronic interface is based on a low-noise, low-power instrumentation amplifier and a configurable heater current driver. The device characterization in nitrogen confirms the possibility to manage the trade-off between the sensitivity and the power delivered to the device by means of the programmable interface.

Integrated thermal flow sensors with programmable power-sensitivity trade-off

Piotto, Massimo;Del Cesta, Simone;Bruschi, Paolo
2018-01-01

Abstract

A thermal flow sensor integrated with a programmable electronic interface into the same chip is proposed. The sensing structure is a micro-calorimeter with a double heater configuration fabricated with a simple post-processing technique applied to chip designed with a commercial CMOS process. The electronic interface is based on a low-noise, low-power instrumentation amplifier and a configurable heater current driver. The device characterization in nitrogen confirms the possibility to manage the trade-off between the sensitivity and the power delivered to the device by means of the programmable interface.
2018
9783319550763
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/889579
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 0
  • ???jsp.display-item.citation.isi??? 0
social impact