A mass flow controller, based on an integrated flow sensor and a thermally actuated solid state regulator, is presented. The sensor is a miniaturized differential calorimeter obtained by postprocessing a silicon chip fabricated by a standard microelectronic process. The regulator consists in a microchannel etched into the surface of a silicon substrate and sealed with a glass plate, joined to the silicon die using anodic bonding. Flow regulation is achieved by varying the channel temperature by means of a chromium resistor. The two devices are connected in closed-loop through a low noise—low offset electronic circuit. Experimental data, demonstrating the effectiveness of the flow controller, are presented. Limitations of the proposed approach and possible improvements are discussed.
|Autori interni:||BRUSCHI, PAOLO|
|Autori:||BRUSCHI P; NAVARRINI D; PIOTTO M|
|Titolo:||A Closed-Loop Mass Flow Controller Based on Static Solid-State Devices|
|Anno del prodotto:||2006|
|Digital Object Identifier (DOI):||10.1109/JMEMS.2006.876785|
|Appare nelle tipologie:||1.1 Articolo in rivista|