In this work, the authors investigated MoO₃ films with thickness between 30 nm and 1 μm grown at room temperature by solid phase deposition on polycrystalline Cu substrates. Atomic force microscopy, scanning electron microscopy, and scanning tunneling microscopy revealed the presence of a homogenous MoO₃ film with a "grainlike" morphology, while Raman spectroscopy showed an amorphous character of the film. Nanoindentation measurements evidenced a coating hardness and stiffness comparable with the copper substrate ones, while Auger electron spectroscopy, x-ray absorption spectroscopy, and secondary electron spectroscopy displayed a pure MoO₃ stoichiometry and a work function Φ MoO₃ = 6.5 eV, 1.8 eV higher than that of the Cu substrate. MoO₃ films of thickness between 30 and 300 nm evidenced a metallic behavior, whereas for higher thickness, the resistance-temperature curves showed a semiconducting character.

MoO3 films grown on polycrystalline Cu: Morphological, structural, and electronic properties

Mario De Lucia
Investigation
;
2019-01-01

Abstract

In this work, the authors investigated MoO₃ films with thickness between 30 nm and 1 μm grown at room temperature by solid phase deposition on polycrystalline Cu substrates. Atomic force microscopy, scanning electron microscopy, and scanning tunneling microscopy revealed the presence of a homogenous MoO₃ film with a "grainlike" morphology, while Raman spectroscopy showed an amorphous character of the film. Nanoindentation measurements evidenced a coating hardness and stiffness comparable with the copper substrate ones, while Auger electron spectroscopy, x-ray absorption spectroscopy, and secondary electron spectroscopy displayed a pure MoO₃ stoichiometry and a work function Φ MoO₃ = 6.5 eV, 1.8 eV higher than that of the Cu substrate. MoO₃ films of thickness between 30 and 300 nm evidenced a metallic behavior, whereas for higher thickness, the resistance-temperature curves showed a semiconducting character.
2019
Macis, Salvatore; Aramo, Carla; Bonavolontà, Carmela; Cibin, Giannantonio; D’Elia, Alessandro; Davoli, Ivan; DE LUCIA, Mario; Lucci, Massimiliano; Lup...espandi
File in questo prodotto:
File Dimensione Formato  
JVSTA_2019.pdf

accesso aperto

Tipologia: Versione finale editoriale
Licenza: Tutti i diritti riservati (All rights reserved)
Dimensione 3.34 MB
Formato Adobe PDF
3.34 MB Adobe PDF Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/1197147
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 17
  • ???jsp.display-item.citation.isi??? 14
social impact