Modern micromachining technologies have made it possible to realize cost-effective and high-reliability Micro-Opto-Electro-Mechanical Systems (MOEMS). Among these devices, double axis micromirrors are widely used in optical telecommunication systems and they are becoming more and more popular for many applications towards the realization of high resolution projection displays. This paper presents a high-voltage driver designed for the actuation of a double axis scanning micromirror in a 0.18 μm Bipolar-CMOSDMOS (BCD) technology.
A high-voltage driver for a scanning micromirror
FANUCCI, LUCA;
2010-01-01
Abstract
Modern micromachining technologies have made it possible to realize cost-effective and high-reliability Micro-Opto-Electro-Mechanical Systems (MOEMS). Among these devices, double axis micromirrors are widely used in optical telecommunication systems and they are becoming more and more popular for many applications towards the realization of high resolution projection displays. This paper presents a high-voltage driver designed for the actuation of a double axis scanning micromirror in a 0.18 μm Bipolar-CMOSDMOS (BCD) technology.File in questo prodotto:
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