The aim of the paper is to study the electrochemical micromachining (μECM) tool preparation technique and in particular it investigates the effects of μECM parameters such as applied potential, electrolytic concentration, tool positions on final tool shape and dimensions. During microtool fabrication, tungsten micro-shafts of 0.38 mm are electrochemically etched to make the desired cylindrical tools with conical tips. Electrolyte concentrations are varied in the range of 0.1-1.4M for the potential differences of 9V and 15V AC. The shape and size of the tools are also determined for each set of experiments. Tools thus fabricated are used to fabricate single-hole micro-nozzle and multiple-holes micro-nozzle array. Entrance and exit diameters of micronozzles fabricated are measured by SEM and compared to tool geometry.
Etching behavior of tungsten microtool and its applications in electrochemical micromachining
FANTONI, GUALTIERO
2011-01-01
Abstract
The aim of the paper is to study the electrochemical micromachining (μECM) tool preparation technique and in particular it investigates the effects of μECM parameters such as applied potential, electrolytic concentration, tool positions on final tool shape and dimensions. During microtool fabrication, tungsten micro-shafts of 0.38 mm are electrochemically etched to make the desired cylindrical tools with conical tips. Electrolyte concentrations are varied in the range of 0.1-1.4M for the potential differences of 9V and 15V AC. The shape and size of the tools are also determined for each set of experiments. Tools thus fabricated are used to fabricate single-hole micro-nozzle and multiple-holes micro-nozzle array. Entrance and exit diameters of micronozzles fabricated are measured by SEM and compared to tool geometry.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
