A new offset compensation approach for integrated thermal flow meters is described. The method is based on micromachined differential flow sensing structures with the heater split into two identical and symmetrical sections. The power unbalance between the two heaters is used to compensate the intrinsic sensor offset. The effectiveness of the approach is proven by means of experiments performed on micro flow meters fabricated by postprocessing chips produced with a commercial microelectronic process. The tests were devoted to demonstrate the robustness of the offset compensation with respect to variation of both the gas temperature and type.
An Offset Compensation Method With Low Residual Drift for Integrated Thermal Flow Sensors
BRUSCHI, PAOLO;DEI M;PIOTTO, MASSIMO
2011-01-01
Abstract
A new offset compensation approach for integrated thermal flow meters is described. The method is based on micromachined differential flow sensing structures with the heater split into two identical and symmetrical sections. The power unbalance between the two heaters is used to compensate the intrinsic sensor offset. The effectiveness of the approach is proven by means of experiments performed on micro flow meters fabricated by postprocessing chips produced with a commercial microelectronic process. The tests were devoted to demonstrate the robustness of the offset compensation with respect to variation of both the gas temperature and type.| File | Dimensione | Formato | |
|---|---|---|---|
|
49_IEEE_Offset_comp.pdf
solo utenti autorizzati
Tipologia:
Versione finale editoriale
Licenza:
NON PUBBLICO - Accesso privato/ristretto
Dimensione
745.5 kB
Formato
Adobe PDF
|
745.5 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
