A Xenon how regulator based on the dependence of the mass flow from the absolute temperature of the gas pipeline, is proposed. The device is fabricated by means of micromachining and has an area of 1 cm(2) and a weight of few grams. The pipeline is integrated on a silicon substrate while the heater is a chromium resistor deposited on the glass cover: silicon substrate and glass cover are bonded together by means of the anodic bonding technique. Measurements of the dependence of the mass flow from the pressure drop and the absolute temperature are presented and discussed.

A micromachined Xenon flow regulator for space applications

DILIGENTI, ALESSANDRO;NANNINI, ANDREA;PIERI, FRANCESCO;PIOTTO, MASSIMO;
2000-01-01

Abstract

A Xenon how regulator based on the dependence of the mass flow from the absolute temperature of the gas pipeline, is proposed. The device is fabricated by means of micromachining and has an area of 1 cm(2) and a weight of few grams. The pipeline is integrated on a silicon substrate while the heater is a chromium resistor deposited on the glass cover: silicon substrate and glass cover are bonded together by means of the anodic bonding technique. Measurements of the dependence of the mass flow from the pressure drop and the absolute temperature are presented and discussed.
2000
Diligenti, Alessandro; Nannini, Andrea; Pieri, Francesco; Piotto, Massimo; Noci, G.
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/164234
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 2
  • ???jsp.display-item.citation.isi??? 2
social impact