We currently use optical spectroscopy as an in-situ diagnostic tool in the pulsed laser ablation and deposition of superconductive and ferroelectric thin films. The emission from the ablated species is collected from both directions normal and parallel to the plume expansion axis. Space and time resolved measurements enable a quantitative evaluation of density and temperature of the plasma produced by the laser-plume interaction. This characterization of the plume in the early stages of its expansion is important to understand the mechanisms responsible for the efficient laser-matter energy coupling typical of the pulsed laser ablation and deposition process.
Spectroscopy as in-situ diagnostics for pulsed laser deposition of superconductive and ferroelectric thin films
ALLEGRINI, MARIA;FUSO, FRANCESCO;ARIMONDO, ENNIO
1996-01-01
Abstract
We currently use optical spectroscopy as an in-situ diagnostic tool in the pulsed laser ablation and deposition of superconductive and ferroelectric thin films. The emission from the ablated species is collected from both directions normal and parallel to the plume expansion axis. Space and time resolved measurements enable a quantitative evaluation of density and temperature of the plasma produced by the laser-plume interaction. This characterization of the plume in the early stages of its expansion is important to understand the mechanisms responsible for the efficient laser-matter energy coupling typical of the pulsed laser ablation and deposition process.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.