We have designed and fabricated double-sided a.c.-coupled silicon strip detectors on high-resistivity substrates. We discuss the first electrical measurements on a 16 cm(2) strip detector. These detectors are biased via polysilicon resistors on both sides and the decoupling capacitors are integrated on the strip themselves. For a large fraction of the fabricated detectors, the current densities are about 15 nA/cm(2) and the yield of the integrated capacitor is about 99%, without any sign of breakdown up to 100 V (the maximum voltage we have applied).
Results on double-sided ac-coupled silicon strip detectors
BATIGNANI, GIOVANNI;FORTI, FRANCESCO;GIORGI, MARCELLO;RIZZO, GIULIANA;
1996-01-01
Abstract
We have designed and fabricated double-sided a.c.-coupled silicon strip detectors on high-resistivity substrates. We discuss the first electrical measurements on a 16 cm(2) strip detector. These detectors are biased via polysilicon resistors on both sides and the decoupling capacitors are integrated on the strip themselves. For a large fraction of the fabricated detectors, the current densities are about 15 nA/cm(2) and the yield of the integrated capacitor is about 99%, without any sign of breakdown up to 100 V (the maximum voltage we have applied).File in questo prodotto:
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