An electronic circuit for the characterization of two-axis accelerometers is presented, implementing a non-linear method which reduces the effect of parasitic signals. Single-ended and differential measurements were used to extract a value of 0.15 for the cross-sensitivity of the device. Other parameters, like the pull-in voltage, the quality factors and the resonance frequencies, are extracted as well. Curves of the frequency response at different pressure levels, and with different dc bias voltages are presented.
Autori interni: | |
Autori: | Bruschi P; Nannini A; Paci D; Pieri F |
Titolo: | A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers |
Anno del prodotto: | 2005 |
Digital Object Identifier (DOI): | 10.1016/j.sna.2005.04.028 |
Appare nelle tipologie: | 1.1 Articolo in rivista |
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