An electronic circuit for the characterization of two-axis accelerometers is presented, implementing a non-linear method which reduces the effect of parasitic signals. Single-ended and differential measurements were used to extract a value of 0.15 for the cross-sensitivity of the device. Other parameters, like the pull-in voltage, the quality factors and the resonance frequencies, are extracted as well. Curves of the frequency response at different pressure levels, and with different dc bias voltages are presented.
|Autori:||Bruschi P; Nannini A; Paci D; Pieri F|
|Titolo:||A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers|
|Anno del prodotto:||2005|
|Digital Object Identifier (DOI):||10.1016/j.sna.2005.04.028|
|Appare nelle tipologie:||1.1 Articolo in rivista|