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EnglishWe report the fabrication and characterization of microelectromechanical systems (MEMS) prototypes based on a microcantilever coated with a NiTi thin film. The NiTi film was deposited by laser ablation and deposition in ultra-high vacuum. The samples were characterized from the mechanical point of view by measuring the resonance frequency of the cantilever as a function of the temperature. Data show a clear phase transition of the NiTi film, with relevant transition temperatures close to those of the bulk, which demonstrates the congruency of the deposition method. We have also developed a technique to control the deflection of the NiTi-coated cantilever by all-optical means, both continuous and pulsed, the latter with typical time scales in the hundreds of mus range.
| Autori interni: | |
| Autori: | A. Camposeo; F. Fuso; M. Allegrini; Arimondo E; A. Tuissi |
| Titolo: | Pulsed laser deposition and characterization of NiTi-based MEMS prototypes |
| Anno del prodotto: | 2004 |
| Digital Object Identifier (DOI): | 10.1007/s00339-004-2687-x |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
http://hdl.handle.net/11568/187204
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