We report the fabrication and characterization of microelectromechanical systems (MEMS) prototypes based on a microcantilever coated with a NiTi thin film. The NiTi film was deposited by laser ablation and deposition in ultra-high vacuum. The samples were characterized from the mechanical point of view by measuring the resonance frequency of the cantilever as a function of the temperature. Data show a clear phase transition of the NiTi film, with relevant transition temperatures close to those of the bulk, which demonstrates the congruency of the deposition method. We have also developed a technique to control the deflection of the NiTi-coated cantilever by all-optical means, both continuous and pulsed, the latter with typical time scales in the hundreds of mus range.
|Autori:||A. Camposeo; F. Fuso; M. Allegrini; Arimondo E; A. Tuissi|
|Titolo:||Pulsed laser deposition and characterization of NiTi-based MEMS prototypes|
|Anno del prodotto:||2004|
|Digital Object Identifier (DOI):||10.1007/s00339-004-2687-x|
|Appare nelle tipologie:||1.1 Articolo in rivista|