We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (C) 2002 Elsevier Science B.V All rights reserved.

Laser Deposition of Shape-Memory Alloy for MEMS Applications

PUCCINI, NICOLA;FUSO, FRANCESCO;ALLEGRINI, MARIA;ARIMONDO, ENNIO;
2003

Abstract

We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (C) 2002 Elsevier Science B.V All rights reserved.
A., Camposeo; Puccini, Nicola; Fuso, Francesco; Allegrini, Maria; Arimondo, Ennio; A., Tuissi
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/187383
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