The design and the analysis of a comb-finger actuator require the evaluation of the coupling capacitances as well as the estimation of the electrostatic forces. Several approaches are possible: very rough approximations based on combinations of parallel plate capacitor elements, analytical or numerical Schwarz-Christoffel (SC) conformal mapping-based techniques, numerical solutions of the electrostatic field equations. Powerful numerical approaches can be very accurate, but heavy and time-consuming, while simple approaches are very inaccurate. A partially analytical approximate method based on SC conformal mapping is discussed. The comparison with results from standard simulators and experimental measurements demonstrates that the studied procedure is fast and satisfactorily accurate. (C) 2004 Elsevier B.V. All rights reserved.

Electrostatic analysis of a comb-finger actuator with Schwarz-Christoffel conformal mapping

BRUSCHI, PAOLO;NANNINI, ANDREA;PIERI, FRANCESCO;
2004

Abstract

The design and the analysis of a comb-finger actuator require the evaluation of the coupling capacitances as well as the estimation of the electrostatic forces. Several approaches are possible: very rough approximations based on combinations of parallel plate capacitor elements, analytical or numerical Schwarz-Christoffel (SC) conformal mapping-based techniques, numerical solutions of the electrostatic field equations. Powerful numerical approaches can be very accurate, but heavy and time-consuming, while simple approaches are very inaccurate. A partially analytical approximate method based on SC conformal mapping is discussed. The comparison with results from standard simulators and experimental measurements demonstrates that the studied procedure is fast and satisfactorily accurate. (C) 2004 Elsevier B.V. All rights reserved.
Bruschi, Paolo; Nannini, Andrea; Pieri, Francesco; Raffa, G; Vigna, B; Zerbini, S.
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/187957
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 14
  • ???jsp.display-item.citation.isi??? 12
social impact