The pressure dependence of the quality factors of several lateral microelectromechanical resonators is measured, by exploiting an electrical, non-linear second harmonic method that eliminates the effect of capacitive parasitics without requiring additional driving and/or frequency conversions. Analytical models for the possible causes of energy loss due to the residual gas surrounding the resonators, namely slide-film and squeeze-film losses, are compared with the experimental data.
Electrical measurements of the quality factor of microresonators and its dependence on the pressure
BRUSCHI, PAOLO;NANNINI, ANDREA;PIERI, FRANCESCO
2004-01-01
Abstract
The pressure dependence of the quality factors of several lateral microelectromechanical resonators is measured, by exploiting an electrical, non-linear second harmonic method that eliminates the effect of capacitive parasitics without requiring additional driving and/or frequency conversions. Analytical models for the possible causes of energy loss due to the residual gas surrounding the resonators, namely slide-film and squeeze-film losses, are compared with the experimental data.File in questo prodotto:
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