EnglishThe pressure dependence of the quality factors of several lateral microelectromechanical resonators is measured, by exploiting an electrical, non-linear second harmonic method that eliminates the effect of capacitive parasitics without requiring additional driving and/or frequency conversions. Analytical models for the possible causes of energy loss due to the residual gas surrounding the resonators, namely slide-film and squeeze-film losses, are compared with the experimental data.
| Autori: | |
| Autori: | BRUSCHI P; NANNINI A; PIERI F |
| Titolo: | Electrical measurements of the quality factor of microresonators and its dependence on the pressure |
| Anno del prodotto: | 2004 |
| Abstract: | The pressure dependence of the quality factors of several lateral microelectromechanical resonators is measured, by exploiting an electrical, non-linear second harmonic method that eliminates the effect of capacitive parasitics without requiring additional driving and/or frequency conversions. Analytical models for the possible causes of energy loss due to the residual gas surrounding the resonators, namely slide-film and squeeze-film losses, are compared with the experimental data. |
| Digital Object Identifier (DOI): | 10.1016/j.sna.2004.01.059 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
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Utilizza questo identificativo per citare o creare un link a questo documento:
http://hdl.handle.net/11568/188353
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