The pressure dependence of the quality factors of several lateral microelectromechanical resonators is measured, by exploiting an electrical, non-linear second harmonic method that eliminates the effect of capacitive parasitics without requiring additional driving and/or frequency conversions. Analytical models for the possible causes of energy loss due to the residual gas surrounding the resonators, namely slide-film and squeeze-film losses, are compared with the experimental data.
|Autori interni:||BRUSCHI, PAOLO|
|Autori:||BRUSCHI P; NANNINI A; PIERI F|
|Titolo:||Electrical measurements of the quality factor of microresonators and its dependence on the pressure|
|Anno del prodotto:||2004|
|Digital Object Identifier (DOI):||10.1016/j.sna.2004.01.059|
|Appare nelle tipologie:||1.1 Articolo in rivista|