The paper presents the design and characterization of a smart IC driver for MEMS scanning micromirrors. The driver integrates in 0.18 mu m BCD technology the cascade of the following circuits: resistor-string DAC circuitry for direct interface to a host digital processing unit, a voltage buffer between the DAC and the High-Voltage (HV) stage, and a fully-differential HV amplifier with programmable output common mode. A couple of the designed DACs permits to generate, starting from digital samples, low-voltage analog stimuli. This signal amplified up to 25 V by the HV stage provides the electrostatical actuation of the micromirror. When compared to state-of-the-art the driver offers an integrated solution with good dynamic performances.

Design of an integrated scanning micromirror driver in BCD technology

SAPONARA, SERGIO;FANUCCI, LUCA;
2011

Abstract

The paper presents the design and characterization of a smart IC driver for MEMS scanning micromirrors. The driver integrates in 0.18 mu m BCD technology the cascade of the following circuits: resistor-string DAC circuitry for direct interface to a host digital processing unit, a voltage buffer between the DAC and the High-Voltage (HV) stage, and a fully-differential HV amplifier with programmable output common mode. A couple of the designed DACs permits to generate, starting from digital samples, low-voltage analog stimuli. This signal amplified up to 25 V by the HV stage provides the electrostatical actuation of the micromirror. When compared to state-of-the-art the driver offers an integrated solution with good dynamic performances.
Saponara, Sergio; Baldetti, T; Fanucci, Luca; Volpi, E; D'Ascoli, F.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/188451
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