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EnglishThe paper presents the design and characterization of a smart IC driver for MEMS scanning micromirrors. The driver integrates in 0.18 mu m BCD technology the cascade of the following circuits: resistor-string DAC circuitry for direct interface to a host digital processing unit, a voltage buffer between the DAC and the High-Voltage (HV) stage, and a fully-differential HV amplifier with programmable output common mode. A couple of the designed DACs permits to generate, starting from digital samples, low-voltage analog stimuli. This signal amplified up to 25 V by the HV stage provides the electrostatical actuation of the micromirror. When compared to state-of-the-art the driver offers an integrated solution with good dynamic performances.
| Autori interni: | |
| Autori: | Saponara S; Baldetti T; Fanucci L; Volpi E; D'Ascoli F |
| Titolo: | Design of an integrated scanning micromirror driver in BCD technology |
| Anno del prodotto: | 2011 |
| Abstract: | The paper presents the design and characterization of a smart IC driver for MEMS scanning micromirrors. The driver integrates in 0.18 mu m BCD technology the cascade of the following circuits: resistor-string DAC circuitry for direct interface to a host digital processing unit, a voltage buffer between the DAC and the High-Voltage (HV) stage, and a fully-differential HV amplifier with programmable output common mode. A couple of the designed DACs permits to generate, starting from digital samples, low-voltage analog stimuli. This signal amplified up to 25 V by the HV stage provides the electrostatical actuation of the micromirror. When compared to state-of-the-art the driver offers an integrated solution with good dynamic performances. |
| Digital Object Identifier (DOI): | 10.1142/S0218126611007608 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
http://hdl.handle.net/11568/188451
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