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EnglishA single-chip smart flow sensor based on a thermal principle is presented. The device is fabricated through a commercial complementary metal-oxide- semiconductor (CMOS) process combined with a postprocessing procedure. A configurable electronic interface performing signal reading and nonideality compensation is integrated with the sensing structures on the same chip. The interface implements recently proposed approaches to offset and pressure effect compensation. Detailed experimental results are presented demonstrating correct operation of the proposed microsystem.
| Autori interni: | |
| Autori: | PIOTTO M; DEI M; BUTTI F; PENNELLI G; BRUSCHI P |
| Titolo: | Smart Flow Sensor With On-Chip CMOS Interface Performing Offset and Pressure Effect Compensation |
| Anno del prodotto: | 2012 |
| Abstract: | A single-chip smart flow sensor based on a thermal principle is presented. The device is fabricated through a commercial complementary metal-oxide- semiconductor (CMOS) process combined with a postprocessing procedure. A configurable electronic interface performing signal reading and nonideality compensation is integrated with the sensing structures on the same chip. The interface implements recently proposed approaches to offset and pressure effect compensation. Detailed experimental results are presented demonstrating correct operation of the proposed microsystem. |
| Digital Object Identifier (DOI): | 10.1109/JSEN.2012.2210788 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
| File | Descrizione | Tipologia | Licenza | |
|---|---|---|---|---|
| 56_IEEE_Mic_chip.pdf | Versione finale editoriale | NON PUBBLICO - Accesso privato/ristretto | Utenti riconosciuti Richiedi una copia |
http://hdl.handle.net/11568/189767
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